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sensor phenomena and characterization

1actuators 1approximation methods 1bandwidth 1displacement measurement 1frequency measurement 1image resolution 1measurement by laser beam 1noise

1Bazaei, Ali 1Boudaoud, Mokrane 1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian 1Fleming, Andrew J. 1Regnier, Stephane

1conference paper 1journal article

Date

12012 12019

Facets

1actuators 1approximation methods 1bandwidth 1displacement measurement 1frequency measurement 1image resolution 1measurement by laser beam 1noise

1Bazaei, Ali 1Boudaoud, Mokrane 1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian 1Fleming, Andrew J. 1Regnier, Stephane

1conference paper 1journal article

Date

12012 12019

Title
Creator
Date

Displacement sensing by piezoelectric transducers in high-speed lateral nanopositioning

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
Resource Type: journal article
Date: 2019

Estimating the resolution of nanopositioning systems from frequency domain data

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: conference paper
Date: 2012

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